Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/06/2018
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Application #:
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15534904
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Filing Dt:
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06/09/2017
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Publication #:
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Pub Dt:
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12/14/2017
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Inventor:
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Hideki HARIYA
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Title:
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METHOD OF MANUFACTURING AN EPITAXIAL WAFER COMPRISING MEASURING A LEVEL DIFFERENCE BETWEEN A FRONT SURFACE OF A SUSCEPTOR AND AN UPPER SURFACE OF A LIFT PIN AND ADJUSTING A RATIO OF THE HEAT SOURCE OUTPUT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-0004 |
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| ARENT FOX LLP |
| 1717 K STREET, NW |
| WASHINGTON, DC 20006 |
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