Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15219467
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Filing Dt:
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07/26/2016
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Publication #:
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Pub Dt:
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11/17/2016
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Inventors:
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Aaron Archer Waterman, Yuichiro Morozumi, Tetsushi Ozaki, Sanjeev Kaushal et al
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Title:
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METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONTAMINATION DUE TO ISOLATED PROCESS EVENTS AND SYSTEMATIC TRENDS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| AMIN, TUROCY & WATSON, LLP |
| 127 PUBLIC SQUARE |
| 57TH FLOOR, KEY TOWER |
| CLEVELAND, OH 44114 |
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