Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15824061
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Filing Dt:
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11/28/2017
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Inventors:
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Luc Albarede, Yassine Kabouzi, Jorge Luque
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Title:
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Method and Apparatus for Real-Time Monitoring of Plasma Chamber Wall Condition
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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FRANK L. BERNSTEIN |
SINGULARITY LLP |
555 TWIN DOLPHIN DRIVE, SUITE 610 |
REDWOOD SHORES, CA 94065 |
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