Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/27/2018
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Application #:
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14630806
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Filing Dt:
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02/25/2015
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Publication #:
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Pub Dt:
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09/03/2015
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Inventors:
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Masashi Itonaga, Masanobu Watanabe
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Title:
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PROCESSING GAS GENERATING APPARATUS, PROCESSING GAS GENERATING METHOD, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-6325, JAPAN |
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ABELMAN, FRAYNE & SCHWAB/LEE |
666 THIRD AVENUE |
10TH FLOOR |
NEW YORK, NY 10017-5621 |
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