Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/25/2018
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Application #:
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15240781
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Filing Dt:
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08/18/2016
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Publication #:
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Pub Dt:
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02/23/2017
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Inventors:
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Martin Jacobus Johan JAK, Hendrik Jan Hidde SMILDE, Te-Chih HUANG et al
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Title:
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METROLOGY METHOD AND APPARATUS, SUBSTRATES FOR USE IN SUCH METHODS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS NL-5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS NL-5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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