Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2019
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Application #:
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15708264
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Filing Dt:
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09/19/2017
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Publication #:
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Pub Dt:
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03/22/2018
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Inventors:
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Akiteru Ko, Eric Chih-Fang Liu
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Title:
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SPACER FORMATION FOR SELF-ALIGNED MULTI-PATTERNING TECHNIQUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| KRISTI DAVIDSON |
| 441 VINE ST. |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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