Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2019
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Application #:
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15578312
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Filing Dt:
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11/30/2017
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Publication #:
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Pub Dt:
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05/31/2018
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Inventors:
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Paul Cornelis Hubertus ABEN, Sanjaysingh LALBAHADOERSING et al
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Title:
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METHOD FOR TRANSFERRING A MARK PATTERN TO A SUBSTRATE, A CALIBRATION METHOD, AND A LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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