Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2019
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Application #:
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15854303
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Filing Dt:
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12/26/2017
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Publication #:
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Pub Dt:
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06/28/2018
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Inventors:
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Hiroshi MATSUMOTO, Hiroshi YAMASHITA, Kenichi KATAOKA
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Title:
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APERTURE SET FOR MULTI-BEAM AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8-1, SHINSUGITA-CHO, ISOGO-KU |
YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522 |
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OBLON, ET AL. |
1940 DUKE STREET |
ALEXANDRIA, VA 22314 |
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09/23/2024 01:48 AM
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