Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/19/2019
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Application #:
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15070384
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Filing Dt:
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03/15/2016
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Publication #:
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Pub Dt:
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09/21/2017
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Inventors:
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Sean P. Kilcoyne, Robert M. Emerson, Michael V. Liguori
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Title:
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IN-SITU CALIBRATION STRUCTURES AND METHODS OF USE IN SEMICONDUCTOR PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 870 WINTER STREET |
| WALTHAM, MASSACHUSETTS 02451-1449 |
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| JOSEPH M. MARAIA |
| 125 SUMMER STREET |
| BOSTON, MA 02110 |
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