Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/2019
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Application #:
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15184670
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Filing Dt:
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06/16/2016
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Publication #:
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Pub Dt:
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12/22/2016
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Inventors:
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Qiwei LIANG, Srinivas D. NEMANI, Ellie Y. YIEH
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Title:
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GAS CONTROL IN PROCESS CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN LLP |
| 24 GREENWOOD PLAZA |
| SUITE 1600 |
| HOUSTON, TX 07702 |
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