Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/2019
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Application #:
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14030686
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Filing Dt:
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09/18/2013
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Publication #:
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Pub Dt:
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05/15/2014
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Inventor:
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IAN J. BROWN
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Title:
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SUBSTRATE CLEANING METHOD AND SYSTEM USING ATMOSPHERIC PRESSURE ATOMIC OXYGEN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA |
| 6-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2545 W. FRYE RD. |
| SUITE 1 |
| CHANDLER, AZ 85224 |
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