Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2019
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Application #:
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15884919
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Filing Dt:
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01/31/2018
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Publication #:
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Pub Dt:
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03/28/2019
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Inventors:
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Jr-Sheng CHEN, Yu-Pei CHIANG, Chin-Han MENG, Chih-Hsien HSU, Lin-Ching HUANG
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Title:
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METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE HAVING A CAVITY AND THROUGH-HOLES OF DIFFERENT WIDTHS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| BIRCH STEWART KOLASCH & BIRCH LLP |
| 8110 GATEHOUSE ROAD, SUITE 100 EAST |
| FALLS CHURCH, VA 22042-1248 |
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