Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2019
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Application #:
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15618422
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Filing Dt:
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06/09/2017
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Publication #:
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Pub Dt:
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06/21/2018
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Inventors:
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Hua-Tai Lin, Yu-Chuan Yang, Wen-Ta Liang, Ching-Huang Chen, Chi-Yuan Sun, Shih-Che Wang
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Title:
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Lithography Patterning with Sub-Resolution Assistant Patterns and Off-Axis Illumination
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6 |
| HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| HAYNES AND BOONE, LLP IP SECTION |
| 2323 VICTORY AVENUE |
| SUITE 700 |
| DALLAS, TX 75219 |
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