Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/14/2019
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Application #:
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14796357
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Filing Dt:
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07/10/2015
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Publication #:
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Pub Dt:
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01/14/2016
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Inventors:
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Yuichi Shibazaki, Alton Phillips
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Title:
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LITHOGRAPHY TOOL HAVING A RETICLE STAGE CAPABLE OF DYNAMIC RETICLE BENDING TO COMPENSATE FOR DISTORTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA INTERCITY TOWER C |
| 2-15-3, KONAN, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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| STEVEN G ROEDER |
| 5560 CHELSEA AVENUE |
| LA JOLLA, CA 92037 |
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