Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/09/2019
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Application #:
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15833077
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Filing Dt:
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12/06/2017
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Publication #:
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Pub Dt:
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01/31/2019
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Inventors:
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Cheng-Li Fan, Chih-Hao Chen, Wen-Yen Chen
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Title:
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MULTIPLE PATTERNING METHOD USING MASK PORTIONS TO ETCH SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN |
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PATTERSON & SHERIDAN, LLP |
24 GREENWAY PLAZA |
SUITE 1600 |
HOUSTON, TX 77046 |
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09/21/2024 04:01 AM
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