Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/03/2019
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Application #:
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15667401
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Filing Dt:
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08/02/2017
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Publication #:
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Pub Dt:
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02/07/2019
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Inventors:
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Andrew V. Hill, Amnon Manassen, Andrei V. Shchegrov, Noam Sapiens
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Title:
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Overlay Metrology Using Multiple Parameter Configurations
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
14301 FNB PARKWAY |
SUITE 220 |
OMAHA, NE 68154-5299 |
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