Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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14812011
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Filing Dt:
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07/29/2015
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Publication #:
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Pub Dt:
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03/17/2016
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Inventors:
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Nezih Ünal, Christoph Sambale
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Title:
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PROCESS ARTEFACT COMPENSATION UPON TRANSFER OF A MASK LAYOUT ONTO A MASK SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ESCHENSTRASSE 66 |
| TAUFKIRCHEN, GERMANY 82024 |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN, LL |
| 1250 CONNECTICUT AVE NW |
| SUITE 700 |
| WASHINGTON, DC 20036 |
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