Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/01/2019
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Application #:
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15700247
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Filing Dt:
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09/11/2017
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Publication #:
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Pub Dt:
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03/08/2018
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Inventors:
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Hannu Huotari, Tom E. Blomberg
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Title:
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COMBINATION CVD/ALD METHOD, SOURCE AND PULSE PROFILE MODIFICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS NL-1322 AP |
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| SEPPO LAINE OY |
| ITÄMERENKATU 3 A |
| HELSINKI, 00180 FINLAND |
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