Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
12/24/2019
|
Application #:
|
16114883
|
Filing Dt:
|
08/28/2018
|
|
Publication #:
|
|
Pub Dt:
|
12/27/2018
| | | | |
|
Inventors:
|
Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler et al
|
|
Title:
|
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION EXPOSURE SYSTEM, AND ILLUMINATION SYSTEM
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
|
|
|
|
| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
|
|
Search Results as of:
06/17/2024 02:02 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
