Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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15482243
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Filing Dt:
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04/07/2017
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Publication #:
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Pub Dt:
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10/11/2018
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Inventors:
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Shusuke YOSHITAKE, Manabu ISOBE, Thomas SCHERUEBL, Dirk BEYER, Sven HEISIG
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Title:
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PATTERN INSPECTION APPARATUS, PATTERN POSITION MEASUREMENT APPARATUS, AERIAL IMAGE MEASUREMENT SYSTEM, METHOD FOR MEASURING AERIAL IMAGE, PATTERN POSITION REPAIRING APPARATUS, METHOD FOR REPAIRING PATTERN POSITION, AERIAL IMAGE DATA PROCESSING APPARATUS, METHOD FOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, SHINSUGITA-CHO, ISOGO-KU |
| YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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