Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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05/12/2020
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Application #:
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15322653
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Filing Dt:
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12/28/2016
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Publication #:
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Pub Dt:
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06/15/2017
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Inventors:
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Ernst Hendrik August Granneman, Leilei HU
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRATES USING AN APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| SUITE 1100 |
| BOSTON, MA 02109 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 10 |
| ALMERE, NETHERLANDS 1322 AP |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| SUITE 1100 |
| BOSTON, MA 02109 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 10 |
| ALMERE, NETHERLANDS 1322 AP |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| SUITE 1100 |
| BOSTON, MA 02109 |
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