Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/2020
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Application #:
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15753811
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Filing Dt:
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02/20/2018
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Publication #:
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Pub Dt:
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08/30/2018
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Inventors:
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Vadim Yevgenyevich BANINE, Han-Kwang NIENHUYS, Luigi SCACCABAROZZI
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Title:
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SUPPRESSION FILTER, RADIATION COLLECTOR AND RADIATION SOURCE FOR A LITHOGRAPHIC APPARATUS; METHOD OF DETERMINING A SEPARATION DISTANCE BETWEEN AT LEAST TWO REFLECTIVE SURFACE LEVELS OF A SUPPRESSION FILTER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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