Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/2020
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Application #:
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15319275
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Filing Dt:
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12/15/2016
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Publication #:
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Pub Dt:
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05/25/2017
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Inventor:
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Takayuki SUZUKI
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Title:
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METHOD OF MEASURING GAS INTRODUCING HOLE PROVIDED IN ELECTRODE FOR PLASMA ETCHING DEVICE, ELECTRODE, ELECTRODE REGENERATION METHOD, REGENERATED ELECTRODE, PLASMA ETCHING DEVICE, AND GAS INTRODUCING HOLE STATE DISTRIBUTION DIAGRAM AND DISPLAY METHOD FOR SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJISTAR KODENMACHO BLDG., 2F-B, 4-3, |
| NIHONBASHI-KODENMACHO, |
| CHUO-KU, TOKYO 1030001, JAPAN |
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| GERALDINE MARTI |
| LADAS & PARRY LLP |
| 1040 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10018-3738 |
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