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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/01/2020
Application #:
16110348
Filing Dt:
08/23/2018
Publication #:
Pub Dt:
02/27/2020
Inventors:
Behzad LAJEVARDI, Willie Ku, Tom TRINH, Henry CHAN
Title:
EXTRACTING REAL-TIME DATA FROM ETHERCAT SENSOR BUS IN A SUBSTRATE PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
046683/0332Recorded: 08/23/2018Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/21/2018
Exec Dt:
08/21/2018
Exec Dt:
08/21/2018
Exec Dt:
08/22/2018
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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