Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/22/2020
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Application #:
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14567161
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Filing Dt:
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12/11/2014
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Publication #:
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Pub Dt:
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06/16/2016
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Inventors:
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Brian T. WEST, Soundarrajan JEMBULINGAM, Manoj A. GAJENDRA
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Title:
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GAS COOLED ELECTROSTATIC CHUCK (ESC) HAVING A GAS CHANNEL FORMED THEREIN AND COUPLED TO A GAS BOX ON BOTH ENDS OF THE GAS CHANNEL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON + SHERIDAN, LLP |
595 SHREWSBURY AVE |
SUITE 100 |
SHREWSBURY, NJ 07702 |
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