Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2020
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Application #:
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16049258
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Filing Dt:
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07/30/2018
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Publication #:
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Pub Dt:
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02/21/2019
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Inventors:
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STEVEN MCCLELLAN GEORGE, NICHOLAS RAY JOHNSON, JAIME WILLADEAN DUMONT et al
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Title:
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Enhancement of Thermal Atomic Layer Etching
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1800 GRANT STREET, 8TH FLOOR |
| DENVER, COLORADO 80203 |
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| SAUL EWING ARNSTEIN & LEHR LLP |
| 1500 MARKET STREET, 38TH FLOOR |
| PHILADELPHIA, PA 19102-2186 |
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