Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/10/2020
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Application #:
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15718480
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Filing Dt:
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09/28/2017
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Publication #:
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Pub Dt:
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10/04/2018
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Inventors:
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Matthias Wietstruck, Philip Kulse, Steffen Marschmeyer, Mehmet Kaynak, Marco Lisker et al
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Title:
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TECHNOLOGICAL METHOD FOR PREVENTING, BY MEANS OF BURIED ETCH STOP LAYERS, THE CREATION OF VERTICAL/LATERAL INHOMOGENEITIES WHEN ETCHING THROUGH-SILICON VIAS
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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IM TECHNOLOGIEPARK 25 |
FRANKFURT (ODER), GERMANY 15236 |
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WARE, FRESSOLA, MAGUIRE & BARBER LLP |
BRADFORD GREEN, BUILDING 5 |
755 MAIN STREET |
MONROE, CT 06468 |
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