Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/08/2020
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Application #:
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16273037
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Filing Dt:
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02/11/2019
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Publication #:
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Pub Dt:
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06/20/2019
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Inventors:
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Allen R. Kirkpatrick, Sean R. Kirkpatrick, Michael J. Walsh
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Title:
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METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY AND ARTICLES PRODUCED THEREBY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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20 FORTUNE DRIVE |
BILLERICA, MASSACHUSETTS 01821 |
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BURNS & LEVINSON LLP |
125 HIGH STREET |
BOSTON, MA 02110 |
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