Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/30/2021
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Application #:
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16025970
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Filing Dt:
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07/02/2018
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Publication #:
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Pub Dt:
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03/21/2019
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Inventors:
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Hong Won LEE, Chang Dol KIM, Jeong Hee JO, Sung Ho KANG, Gyu Ho CHOI
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Title:
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PLASMA PROCESSING APPARATUS HAVING INJECTION PORTS AT BOTH SIDES OF THE GROUND ELECTRODE FOR BATCH PROCESSING OF SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 42, CHUGYE-RO, YANGJI-MYEON, CHEOIN-GU |
| YONGIN-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 17156 |
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| RENAISSANCE IP LAW GROUP LLP (PIP) |
| 1500 NW BETHANY BLVD. SUITE 200 |
| BEAVERTON, OR 97006 |
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