Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/30/2021
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Application #:
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15960790
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Filing Dt:
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04/24/2018
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Publication #:
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Pub Dt:
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11/01/2018
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Inventors:
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Eiichi YAMAMOTO, Yoshihiro TERAKUBO, Takahiko MITSUI, Toshihiro ITO
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Title:
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ELECTROSTATIC ATTACHMENT CHUCK, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2993, GOBARA, ANNAKA-SHI |
| GUNMA, JAPAN 379-0135 |
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| RANKIN, HILL & CLARK LLP |
| 23755 LORAIN ROAD, SUITE 200 |
| NORTH OLMSTED, OH 44070 |
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