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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
11029614
Issue Dt:
06/08/2021
Application #:
16318388
Filing Dt:
01/17/2019
Publication #:
20190243259
Pub Dt:
08/08/2019
Inventors:
Wim Tjibbo TEL, Frank STAALS, Tanbir HASAN, Martin Jules Marie-Emile DE NIVELLE
Title:
LEVEL SENSOR APPARATUS, METHOD OF MEASURING TOPOGRAPHICAL VARIATION ACROSS A SUBSTRATE, METHOD OF MEASURING VARIATION OF A PHYSICAL PARAMETER RELATED TO A LITHOGRAPHIC PROCESS, AND LITHOGRAPHIC APPARATUS
Assignment: 1
Reel/Frame:
048045/0914Recorded: 01/17/2019Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TEL, WIM TJIBBO
Exec Dt:
08/02/2016
STAALS, FRANK
Exec Dt:
08/26/2016
DE NIVELLE, MARTIN JULES MARIE-EMILE
Exec Dt:
08/02/2016
HASAN, TANBIR
Exec Dt:
08/02/2016
Assignee:
ASML NETHERLANDS B.V.
PO BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
PO BOX 10500
MCLEAN, VA 22102
Assignment: 2
Reel/Frame:
048045/0891Recorded: 01/17/2019Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TEL, WIM TJIBBO
Exec Dt:
12/16/2016
STAALS, FRANK
Exec Dt:
12/21/2016
DE NIVELLE, MARTIN JULES MARIE-EMILE
Exec Dt:
12/19/2016
HASAN, TANBIR
Exec Dt:
03/07/2016
Assignee:
ASML NETHERLANDS B.V.
PO BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
PO BOX 10500
MCLEAN, VA 22102

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