Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/06/2021
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Application #:
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16238926
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Filing Dt:
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01/03/2019
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Publication #:
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Pub Dt:
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07/09/2020
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Inventors:
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Maolin LONG, Neema RASTGAR, Alexander Miller PATERSON
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Title:
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METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH TRANSFORMER COUPLED PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HARNESS DICKEY & PIERCE, P.L.C. (LAM) |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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