Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/20/2021
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Application #:
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16899825
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Filing Dt:
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06/12/2020
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Publication #:
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Pub Dt:
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10/01/2020
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Inventors:
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Chi YANG, Sheng-Ta LIN, Shang-Chieh CHIEN, Li-Jui CHEN, Po-Chung CHENG
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Title:
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EXTREME ULTRAVIOLET RADIATION SOURCE AND CLEANING METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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MCCLURE, QUALEY & RODACK, LLP |
280 INTERSTATE NORTH CIRCLE SE |
SUITE 550 |
ATLANTA, GA 30339 |
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09/23/2024 03:52 AM
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