Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/2021
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Application #:
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15756463
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Filing Dt:
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02/28/2018
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Publication #:
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Pub Dt:
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08/30/2018
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Inventors:
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Takumi TOIDA, Takashi MAKINOSHIMA, Takashi SATO, Masatoshi ECHIGO
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Title:
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MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, COMPOSITION FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY AND PRODUCTION METHOD THEREOF, AND RESIST PATTERN FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8324 |
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| FITCH EVEN TABIN & FLANNERY, LLP |
| 120 SOUTH LASALLE STREET |
| SUITE 2100 |
| CHICAGO, IL 60603-3406 |
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