Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/26/2021
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Application #:
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17269909
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Filing Dt:
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02/19/2021
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Publication #:
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Pub Dt:
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08/26/2021
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Inventors:
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Johannes Petrus Martinus Bernardus VERMEULEN et al
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Title:
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SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, SUBSTRATE INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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