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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
11199363
Issue Dt:
12/14/2021
Application #:
16734650
Filing Dt:
01/06/2020
Publication #:
20200142327
Pub Dt:
05/07/2020
Inventors:
Fred ROOZEBOOM, Dirk Heinrich EHM, Andrea ILLIBERI, Moritz BECKER, Edwin TE SLIGTE et al
Title:
METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHING PROCESS
Assignment: 1
Reel/Frame:
055547/0588Recorded: 03/10/2021Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BECKER, MORITZ
Exec Dt:
01/27/2020
EHM, DIRK HEINRICH
Exec Dt:
01/14/2020
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
EDELL, SHAPIRO & FINNAN, LLC
GEORGE F. LEHNIGK
9801 WASHINGTONIAN BLVD., SUITE 750
GAITHERSBURG, MD 20878
Assignment: 2
Reel/Frame:
055442/0841Recorded: 03/01/2021Pages: 10
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ROOZEBOOM, FRED
Exec Dt:
02/13/2020
ILLIBERI, ANDREA
Exec Dt:
01/15/2020
TE SLIGTE, EDWIN
Exec Dt:
01/15/2020
CREIJGHTON, YVES LODEWIJK MARIA
Exec Dt:
01/14/2020
Assignee:
TNO SCIENCE & INDUSTRY
STIESLTJESWEG 1
DELFT, NETHERLANDS 2628 CK
Correspondent:
EDELL, SHAPIRO & FINNAN, LLC
GEORGE F. LEHNIGK
9801 WASHINGTONIAN BLVD., SUITE 750
GAITHERSBURG, MD 20878
Assignment: 3
Reel/Frame:
057622/0429Recorded: 09/28/2021Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Exec Dt:
12/18/2020
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
EDELL, SHAPIRO & FINNAN, LLC
GEORGE F. LEHNIGK
9801 WASHINGTONIAN BLVD., SUITE 750
GAITHERSBURG, MD 20878
Assignment: 4
Reel/Frame:
057565/0791Recorded: 09/10/2021Pages: 11
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY NAME AND ADDRESS PREVIOUSLY RECORDED AT REEL: 55442 FRAME: 841. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
ROOZEBOOM, FRED
Exec Dt:
09/03/2021
ILLIBERI, ANDREA
Exec Dt:
09/08/2021
TE SLIGTE, EDWIN
Exec Dt:
09/07/2021
CREIJGHTON, YVES LODEWIJK MARIA
Exec Dt:
09/07/2021
Assignee:
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
ANNA VAN BUERENPLEIN 1
GRAVENHAGE, NETHERLANDS 2595 DA'S
Correspondent:
EDELL, SHAPIRO & FINNAN, LLC
9801 WASHINGTONIAN BLVD., SUITE 750
GEORGE F. LEHNIGK
GAITHERSBURG, MD 20787

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