Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/22/2022
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Application #:
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16316128
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Filing Dt:
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01/08/2019
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Publication #:
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Pub Dt:
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09/16/2021
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Inventors:
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Akifumi YAO, Kunihiro YAMAUCHI, Tatsuo MIYAZAKI, Jun LIN, Susumu YAMAUCHI et al
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Title:
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ETCHING METHOD AND ETCHING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5253, OAZA OKIUBE, UBE-SHI |
| YAMAGUCHI, JAPAN 755-0001 |
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| 1030 15TH STREET, N.W. |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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