Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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17032417
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Filing Dt:
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09/25/2020
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Publication #:
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Pub Dt:
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03/25/2021
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Inventors:
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Lawrence S. Melvin III, Yudhishthir Prasad Kandel, Qiliang Yan et al
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Title:
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LITHOGRAPHY IMPROVEMENT BASED ON DEFECT PROBABILITY DISTRIBUTIONS AND CRITICAL DIMENSION VARIATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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690 EAST MIDDLEFIELD ROAD |
MOUNTAIN VIEW, CALIFORNIA 94043 |
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MICHAEL W. FARN |
801 CALIFORNIA STREET |
MOUNTAIN VIEW, CA 94041 |
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