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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/26/2022
Application #:
17032417
Filing Dt:
09/25/2020
Publication #:
Pub Dt:
03/25/2021
Inventors:
Lawrence S. Melvin III, Yudhishthir Prasad Kandel, Qiliang Yan et al
Title:
LITHOGRAPHY IMPROVEMENT BASED ON DEFECT PROBABILITY DISTRIBUTIONS AND CRITICAL DIMENSION VARIATIONS
Assignment: 1
Reel/Frame:
053891/0726Recorded: 09/25/2020Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/24/2020
Exec Dt:
09/24/2020
Exec Dt:
09/24/2020
Exec Dt:
09/25/2020
Assignee:
690 EAST MIDDLEFIELD ROAD
MOUNTAIN VIEW, CALIFORNIA 94043
Correspondent:
MICHAEL W. FARN
801 CALIFORNIA STREET
MOUNTAIN VIEW, CA 94041

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