Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/30/2022
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Application #:
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16825393
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Filing Dt:
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03/20/2020
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Publication #:
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Pub Dt:
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09/23/2021
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Inventors:
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Huixiong Dai, Mangesh Ashok Bangar, Srinivas D. Nemani, Christopher S. Ngai et al
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Title:
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LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN, LLP |
| 595 SHREWSBURY AVE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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