Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2022
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Application #:
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17092335
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Filing Dt:
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11/09/2020
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Publication #:
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Pub Dt:
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05/20/2021
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Inventors:
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Hsien-Ming Lee, Chun-Chen Chen, Ching-Tang Hsueh, Po-Ching Huang
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Title:
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DETECTION METHOD AND DETECTION APPARATUS FOR POLISHING PAD OF CHEMICAL MECHANICAL POLISHING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 49, YU-LIEN ST., BADE DIST., |
| TAOYUAN CITY, TAIWAN 33449 |
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| JCIPRNET |
| 8F-1, NO. 100, ROOSEVELT RD. SEC. 2, |
| TAIPEI, 100404 TAIWAN |
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