Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/13/2022
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Application #:
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16742433
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Filing Dt:
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01/14/2020
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Publication #:
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Pub Dt:
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06/17/2021
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Inventors:
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Sheng-Lin HSIEH, I-Chih CHEN, Ching-Pei HSIEH, Kuan Jung CHEN
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Title:
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TRENCH ETCHING PROCESS FOR PHOTORESIST LINE ROUGHNESS IMPROVEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300 |
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| 16, ZIFENG ROAD, PUKOU ECONOMIC DEVELOPMENT ZONE, JIANGSU PROVINCE |
| NANJING, CHINA |
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| HAUPTMAN HAM, LLP (TSMC) |
| 2318 MILL ROAD |
| SUITE 1400 |
| ALEXANDRIA, VA 22314 |
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