Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/20/2022
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Application #:
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17407678
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Filing Dt:
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08/20/2021
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Publication #:
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Pub Dt:
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03/10/2022
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Inventors:
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Elvino da Silveira, Wayne Fitzgerald, Xin Song, Christopher J. McLaughlin et al
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Title:
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SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16 JONSPIN ROAD |
| WILMINGTON, MASSACHUSETTS 01887 |
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| SCHWEGMAN LUNDBERG & WOESSNER, P.A. |
| P.O. BOX 2938 |
| MINNEAPOLIS,, MN 55402 |
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