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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	11533799	Issue Dt:	12/20/2022	Application #:	17372294	Filing Dt:	07/09/2021
Inventors:	MING-HSUN TSAI, CHENG-HAO LAI, WEI-SHIN CHENG, CHENG-HSUAN WU, CHIAO-HUA CHENG et al
Title:	SYSTEM AND METHOD FOR SUPPLYING TARGET MATERIAL IN AN EUV LIGHT SOURCE

Assignment: 1

Reel/Frame:

056979/0329

Recorded: 07/26/2021

Pages: 5

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

CHEN, HSIN-FENG

Exec Dt:

07/12/2021

TSAI, MING-HSUN

Exec Dt:

07/12/2021

CHEN, LI-JUI

Exec Dt:

07/12/2021

CHIEN, SHANG-CHIEH

Exec Dt:

07/12/2021

LIU, HENG-HSIN

Exec Dt:

07/12/2021

LAI, CHENG-HAO

Exec Dt:

07/23/2021

CHEN, YU-HUAN

Exec Dt:

07/12/2021

CHENG, WEI-SHIN

Exec Dt:

07/13/2021

SUN, YU-KUANG

Exec Dt:

07/12/2021

WU, CHENG-HSUAN

Exec Dt:

07/12/2021

LO, YU-FA

Exec Dt:

07/12/2021

CHENG, CHIAO-HUA

Exec Dt:

07/12/2021

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK

HSINCHU, TAIWAN

Correspondent:

WPAT, PC INTELLECTUAL PROPERTY ATTORNEYS

1100 QUAIL STREET, SUITE 202

NEWPORT BEACH, CA 92660

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