Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/2023
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Application #:
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16932615
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Filing Dt:
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07/17/2020
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Inventors:
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Surajit Kumar, Hui Chen, Chih Chung Chou, Shou-Sung Chang
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Title:
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GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN CHEMICAL MECHANICAL POLISHING
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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ALEXANDER W. SCOGIN |
FISH & RICHARDSON P.C. |
P.O.BOX 1022 |
MINNEAPOLIS, MN 55440-1022 |
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09/24/2024 01:55 PM
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