Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/20/2023
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Application #:
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17460676
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Filing Dt:
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08/30/2021
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Publication #:
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Pub Dt:
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03/03/2022
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Inventors:
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Takehiro KINOSHITA, Noriaki KANAYA, Kenichi KOBAYASHI, Takashi OE
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Title:
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SEMICONDUCTOR MANUFACTURING SYSTEM, CONTROL DEVICE, AND CONTROL METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ABELMAN FRAYNE & SCHWAB |
| 666 THIRD AVENUE, 10TH FLOOR |
| NEW YORK, NY 10017 |
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