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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/11/2023
Application #:
16114629
Filing Dt:
08/28/2018
Publication #:
Pub Dt:
03/07/2019
Inventors:
Ioana Sorina Barbu, Murat Bozkurt, Maurits Van Der Schaar, Alberto Da Costa Assafrao
Title:
METHODS AND APPARATUS FOR MONITORING A MANUFACTURING PROCESS, INSPECTION APPARATUS, LITHOGRAPHIC SYSTEM, DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
046962/0554Recorded: 08/28/2018Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/06/2017
Exec Dt:
09/11/2017
Exec Dt:
09/11/2017
Exec Dt:
09/06/2017
Assignee:
PO BOX 324
VELDHOVEN, NETHERLANDS NL-5500 AH
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
PO BOX 10500
MCLEAN, VA 22102

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