Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2023
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Application #:
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17463328
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Filing Dt:
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08/31/2021
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Publication #:
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Pub Dt:
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03/02/2023
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Inventors:
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Yen-Hsun CHEN, Yi-Zhen CHEN, Jhan-Hong YEH, Han-Lung CHANG, Tzung-Chi FU, Li-Jui CHEN
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Title:
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SYSTEM AND METHOD OF DISCHARGING AN EUV MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6 |
| HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| MICHELLE WU |
| 701 5TH AVE |
| SUITE 5400 |
| SEATTLE, WA 98104 |
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