Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/01/2023
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Application #:
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16890141
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Filing Dt:
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06/02/2020
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Publication #:
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Pub Dt:
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01/21/2021
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Inventors:
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Subhadeep Kal, Matthew Flaugh, Aelan Mosden, Daisuke Ito, Yusuke Muraki
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Title:
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GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF METALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK P.C. |
| 607 14TH ST NW STE 800 |
| WASHINGTON, DC 20005 |
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