Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/10/2023
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Application #:
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17815155
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Filing Dt:
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07/26/2022
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Inventors:
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Chih-Jie LEE, Shih-Ming CHANG, Yung-Sung YEN, Shih-Chun HUANG, Ken-Hsien HSIEH et al
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Title:
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LITHOGRAPHY PROCESS MONITORING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. 6 |
HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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HAYNES AND BOONE, LLP IP SECTION |
2323 VICTORY AVENUE |
SUITE 700 |
DALLAS, TX 75219 |
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05/29/2024 02:53 PM
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