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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/07/2023
Application #:
17365906
Filing Dt:
07/01/2021
Publication #:
Pub Dt:
01/05/2023
Inventors:
Vivek B. Shah, Varoujan Chakarian, Upendra Ummethala
Title:
CONCENTRATION SENSOR FOR PRECURSOR DELIVERY SYSTEM
Assignment: 1
Reel/Frame:
060376/0899Recorded: 06/30/2022Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/18/2022
Exec Dt:
04/07/2022
Exec Dt:
06/28/2022
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
LOWENSTEIN SANDLER LLP
ONE LOWENSTEIN DRIVE
ROSELAND, NJ 07068

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